Deep microstructured transmission gratings used as optical elements in X-ray grating interferometers.
Figure 3. Deep microstructured transmission gratings used as optical elements in X-ray grating interferometers. Left: silicon/gold grating produced at the Paul Scherrer Institut using photolithography, wet etching into silicon, and subsequent electrochemical gold coating. Right: gold grating produced at the Karlsruhe Institute of Technology using electron-beam lithography and subsequent synchrotron X-ray lithography at the ANKA storage ring.

Deep microstructured transmission gratings used as optical elements in X-ray grating interferometers.

Figure 3. Deep microstructured transmission gratings used as optical elements in X-ray grating interferometers. Left: silicon/gold grating produced at the Paul Scherrer Institut using photolithography, wet etching into silicon, and subsequent electrochemical gold coating. Right: gold grating produced at the Karlsruhe Institute of Technology using electron-beam lithography and subsequent synchrotron X-ray lithography at the ANKA storage ring.